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Zhiguang Xu

Postdoctoral Associate

Research: Metrology for Microfluidic Device Manufacturing

Postdoctoral Associate May 2007-Present, Department of Mechanical Engineering in MIT

In this period my research has been focused on the optical measurement or sensing in microfluidic devices, which, also called lab-on-a-chip, has the promise to transform traditional biological, chemical and pharmaceutical apparatuses from large sizes to a single chip.

  1. Developed a minimized Optical Coherence Tomography to inspect the three-dimensional bonding quality of the packaged polymer-based microfluidic devices.
  2. Developed a minimized Optical Doppler tomography to measure the three-dimensional flow velocity distribution inside the polymer-based microfluidic devices.
  3. Developed a white-light confocal microscopy for the automatic measurement of the buried feature such as microvalve membrane thickness in the polymer-based microfluidic devices.
  4. Developed a novel white-light scanning interferometer to measure and control the absolute nano-scale gap formed by two planar plates, which has the promise to be used in hot-embossing technique for process control, in environmental science for water purification, and in biological field to filter DNA or molecules.
  5. Developed a moiré fringe method to determine automatically the micro distortion in hot-embossing process for the production of microfluidic devices, which helped optimizing the manufacturing parameters and improving the product quality.
  6. Developed metrology technology and measurement standard for large-scale high-volume manufacturing of polymer-based microfluidic devices;
  7. Developed data fusion technique for metrology data sets from separate instruments in profile measurement for microfluidic devices, which combined the strengths of multiple instruments by data stitching, data combining and data comparison.

Research Staff Jan. 2007—May 2007, The State key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing, China

  1. Developed the instrumentation and industrialization of the new displacement sensor “Laser Nanometer Ruler” and established the collaboration with a German company, Blankenhorn GmbH, to push the sensor into the global market.

Research Assistant Sep.1999—Dec. 2006, The State key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing, China

  1. Established the theory of cat’s eye laser resonator and folded cat’s eye laser resonator;
  2. Set up a new principle to realize the real-time control of the laser transverse mode by cat’s eye resonator.
  3. Developed a new displacement sensor “Laser Nanometer Ruler” with 79nm resolution 12mm measurement range and self-calibration function;
  4. Developed another displacement sensor “Folded Resonator-Laser nanometer ruler” with 39.6nm resolution 15mm measurement range and self-calibration function.
  5. Developed a laser dynamic testing system for measuring on-line the flap and lag angles of the aircraft rotor blade;

Academic Background

Dec. 2006, PhD. Optical Engineering, Dept. of Precision Instruments and Mechanology, Tsinghua University, Beijing, China (In a continuous academic project that involves postgraduate and doctoral study)

Jul. 1999, B.E. Precision Instruments and Measurement Control Technology, Dept. of Precision Instruments and Mechanology, Tsinghua University, Beijing, China

Publications and Patents

Invited Book Chapter

  1. Zhiguang Xu, Kamal Youcef-toumi, Soon Fatt Yoon, “Nanomanufacturing and Applications of Modern Microfluidic Devices”, Global Nanomanufacturing Research, Nova Science Publishers, Hauppauge, NY, USA, accepted.

Journal Papers

  1. Zhiguang Xu, Vijay Shilpiekandula, Kamal Youcef-toumi, etc., "White-light scanning interferometer for absolute nano-scale gap thickness measurement", Optics Express, 2009, 2009, 17 (17), p15104-15117.
  2. Zhiguang Xu, Hayden K. Taylor, Duane S. Boning, etc., "Large-area and high-resolution distortion measurement based on moiré fringe method for hot embossing process", Optics Express, 2009, 17(21), p 18394–18407.
  3. Zhiguang Xu, Shulian Zhang, Yan Li, etc., “Adjustment-free cat’s eye cavity He-Ne laser and its outstanding stability”, Optics Express, 2005, 13(14), p5565-5573
  4. Zhiguang Xu, Shiguang Li, Soon Fatt Yoon, etc., “Three-Dimensional Profile Stitching Based on the Fiducial Markers for Microfluidic Devices”, Optics Communications, 2009, 282, p493–499.
  5. Vijay Shilpiekandula*, Daniel J. Burns*, Li Shiguang*, Xu Zhiguang*, etc., "Fusion of Metrology Data for Large-Scale High-Volume Manufacturing of Polymer-based Microfluidic Devices", International Journal of Nanomanufacturing, 2009, 3(4), p312-336. (* Authors contributed equally to the paper.)
  6. Zhiguang Xu, Shulian Zhang, Wenhua Du, , etc., “Control of transverse mode pattern in a helium-neon laser using the cat’s eye cavity”, Optics Communications, 2006, 261(1) p118-123
  7. Zhiguang Xu, Shulian Zhang, Wenhua Du, etc., “Misalignment sensitivity of the cat’s eye cavity He-Ne laser”, Optics Communications, 2006, 265(1), p270-276.
  8. Zhiguang Xu, Shulian Zhang, Wenhua Du, etc., “Folded resonator-dual polarization competition laser displacement sensor”, Optics Communications, 2006, 267(1), p170-176.
  9. Zhiguang Xu, Shulian Zhang, Yan Li, etc., “Theoretic analysis of the cat’s eye cavity He-Ne laser”, Acta Physica Sinica, 2006, 55(9), p4665-4672.
  10. Zhiguang Xu, Shulian Zhang, Dong liang, etc., “Research of the Laser Transverse Mode Modulated by the Cat’s eye resonator”, Acta Optica Sinica, 2006, 26(1): p86-90
  11. Zhiguang Xu, Shulian Zhang, Wenhua Du, etc., “Ultra stable and adjustment-free "cat's eye" cavity He-Ne laser”, Laser Technology, 2006, 30(2), p133-135
  12. Zhiguang Xu, Shulian Zhang, Wenhua Du, etc., “Application of cat’s eye resonator in long full-external He-Ne lasers”, Chinese Journal of Lasers, 2005, 32(12), p1610-1613
  13. Shiguang Li, Zhiguang Xu, Ivan Reading, etc., "Three Dimensional Sidewall Measurements by Laser Fluorescent Confocal Microscopy", Optics Express, 2008, 16(6), 4001-4014.
  14. Shiguang Li, Todd Thorsen, Zhiguang Xu, etc., “Microvalve Thickness and Topography Measurements in Microfluidic Devices by White Light Confocal Microscopy”, Applied Optics, 2009, 48 (27), p5088-5094.
  15. Shiguang Li, Zhiguang Xu, Zhong Ping Fang, etc., “Compact optical coherence tomography for inspection of microfluidic devices”, Applied Optics, in preparation.
  16. Yan Li, Xiangwang Meng, Zhiguang Xu, etc., “Laser dynamic testing system of helicopter rotor blade flap and lag angles”, Optical Technique, 2001, 27(3), p214-216
  17. Yan Li, Shulian Zhang, Jie Fu, Xiangwang Meng, Zhiguang Xu, “Study of Displacement Measurement with Nanometer Resolution Based on Birefringent Dual-frequency HeNe Laser Power Turning”, Laser & Infrared, 2001, 31(2), p99-101

Conference Papers

  1. Zhiguang Xu, Vijay Shilpiekandula, Kamal Youcef-toumi, etc., " A novel white-light scanning interferometer for absolute nano-scale gap thickness measurement", 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, FL, USA, accepted.
  2. Zhiguang Xu, Hayden K. Taylor, Duane S. Boning, etc., "Image Processing Technique Based on Moiré Fringe Approach for Distortion Measurement in Hot-embossing Process", SMA 10th Anniversary Symposium, Jan, 2009.
  3. Zhiguang Xu, Vijay Shilpiekandula, Kamal Youcef-toumi, Soon Fatt Yoon, "Absolute Nano-scale Gap Thickness Measurement by a White-light Scanning Interferometer", SMA 10th Anniversary Symposium, 2009.
  4. Shiguang LI, Zhiguang XU, Soon Fatt Yoon, etc., "Measurement Activities in Production of Microfluidic Devices", SMA 10th Anniversary Symposium, 2009.
  5. Hayden K. Taylor, Zhiguang Xu, Kamal Youcef-Toumi, etc., “Moire fringe method for the measurement of distortions of hot-embossed polymeric substrates”, Proc. of SPIE, 2008, 7155, p715528-1-9.
  6. Shiguang Li, Zhiguang Xu, Mazzeo, Aaron, etc., "Review of production of microfluidic devices: Material, manufacturing and metrology", Proceedings of SPIE - The International Society for Optical Engineering, v6993, MEMS, MOEMS, and Micromachining III, 2008, p69930F.
  7. Zhiguang Xu, Shiguang Li, Soon Fatt Yoon, etc., "Complete Surface Distinguishing and Overlapping Technology for Three-dimensional Image Processing of Micro Devices", 5th International Symposium of Nanomanufacturing, Singapore, Jan 2008.
  8. Shiguang Li, Todd Thorsen, Zhiguang Xu, etc., “Microvalve Thickness Measurement in Multi-layer Microfluidic Devices with Chromatic Confocal Microscopy”, 5th International Symposium of Nanomanufacturing, Singapore, Jan 2008.
  9. Vijay Shilpiekandula*, Daniel J. Burns*, Hayden K. Taylor, Kamal Youcef-Toumi, Shiguang Li *, Zhiguang Xu *, Ivan Reading, Soon Fatt Yoon, "Fusion of Metrology Data for Large-Scale High-Volume Manufacturing of Polymer-based Microfluidic Devices", In Proceedings of 2nd International Conference of Micromanufacturing, Clemson University, no. 35, pp. 323-328, Sep 2007. (* Authors contributed equally to the paper.)

Patents

  1. Shulian Zhang, Zhiguang Xu, Yan Li, “Cat’s eye resonator HeNe Lasers”(Chinese Patent), application number: 200410009696.0, public number: CN1601832
  2. Zhiguang Xu, Shulian Zhang, Yan Li, “Cat’s eye folded resonator displacement self-sensing HeNe Laser system”(Chinese Patent), application number: 200510086679.1, public number: CN1746614

Scientific Society Membership

IEEE Member

IEEE Photonics Society Member

OSA Member

SPIE Member

Selected Honors and Awards

2007 Inclusion in “Who's Who in Science and Engineering, 10th Anniversary Edition”.

2000 Certificate of China Ministry of Education - The 7th author of the “Photoelectric measuring system of Z11 helicopter rotor blade flap and lag angles”.

1998 Chairman of the Student Science Society of Dept. of Precision Instruments and Mechanology, Tsinghua University, China

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